ME 580 Introduction to MEMS and Microfabricatiion
This course presents an introduction to the principles, materials, microfabrication techniques, applications and design issues/constraints to realize modern MicroElectroMechanical Systems (MEMS). Students will gain an understanding of microfabrication techniques for MEMS including photolithography, surface and bulk micromachining, LIGA, and other processes. Transduction mechanisms for sensors and actuators (coupling thermal, mechanical and electrical domains) and micro-scale engineering design issues will also be discussed. The course will include laboratory demonstrations with the newly established microfabrication-outside-clean-room facility. Students will do class projects to demonstrate the mastery of basic concepts in design and fabrication process of a MEMS device. Prerequisite: Senior status and graduates.